Publication | Closed Access
X-ray lithography using a KrF laser-plasma source at hν ≈ 1 keV
18
Citations
4
References
1987
Year
Materials ScienceEngineeringBeam LithographyPhysicsMicroscopyElectron-beam LithographyApplied PhysicsLaser-plasma InteractionX-ray LithographyX-ray Free-electron LaserKrf Laser-plasma Source
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