Concepedia

Study of thermal diffusion between Al2O3 and Al thin films

Manuel García Méndez, N. Valles-Villarreal, Gustavo A. Hirata-Flores, M.H. Farı́as

Applied Surface Science · 1999 · 16 citations · 10 references

DOI

Concepts

References

10

Metal-oxide interfaces

F. Ernst · Materials Science and Engineering R Reports · 1995 · 223 citations

A formalism for extracting diffusion coefficients from concentration profiles

P. M. Hall, J.M. Morabito · Surface Science · 1976 · 79 citations

, , +10

On the nature of ?easy paths? for the diffusion of oxygen in thermal oxide films on aluminum

Ken‐ichi Shimizu, R. C. Furneaux, G.E. Thompson et al. · Oxidation of Metals · 1991 · 66 citations

, , +14

Ion sputter rates and yields for iron‐, chromium‐ and aluminium oxide layers

H. Viefhaus, K. Hennesen, M.C. Marco de Lucas et al. · Surface and Interface Analysis · 1994 · 34 citations

, , +17

Irradiation-induced decomposition of Al2O3 during Auger electron spectroscopy analysis

Jae-Won Park, Anthony J. Pedraza, William R. Allen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 22 citations

, , +16