Concepedia

Computer simulation of plasma for plasma immersed ion implantation and deposition with bipolar pulses

Y. Miyagawa, M. Ikeyama, S. Miyagawa, H. Nakadate

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 22 citations · 9 references

DOI

Concepts

References

9

Computer Simulation Using Particles

R. W. Hockney, J.W. Eastwood · 1988 · 2.1K citations

, , +12

Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Donald Rapp, Paula Englander‐Golden · The Journal of Chemical Physics · 1965 · 2K citations

, , +12

Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

C.K. Birdsall · IEEE Transactions on Plasma Science · 1991 · 1.3K citations

, , +16

Plasma physics via computer simulation

T. Tajima · Computer Physics Communications · 1986 · 1.3K citations

, , +14

Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes

J. R. Conrad · Journal of Applied Physics · 1987 · 321 citations · Full text

, , +8