Solar Energy Materials and Solar Cells · 2010 · 34 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMetallurgySemiconductor DevicesOxide SemiconductorsSemiconductor Crystal GrowthSemiconductor Device MaterialsSilicon MaterialsOxygen Distribution UniformitySiliconSilicon Device MaterialsSilicon DioxideVertical Oxygen Distribution
15