Publication | Closed Access
Oxygen distribution on a multicrystalline silicon ingot grown from upgraded metallurgical silicon
34
Citations
15
References
2010
Year
Materials ScienceMaterials EngineeringEngineeringOxygen DistributionNanoelectronicsApplied PhysicsUpgraded Metallurgical SiliconSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMulticrystalline SiliconSilicon Debugging
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