Microelectronic Engineering · 1999 · 37 citations · 5 references
Materials ScienceEngineeringSensorsMicrofabricationGas SensorMechanical EngineeringSensor DesignGas DetectionPorous SensorSensor TechnologyGas Sensors
5
Thermal analysis using a micromechanical calorimeter
Rüdiger Berger, Ch. Gerber, James K. Gimzewski et al. · Applied Physics Letters · 1996 · 159 citations
Sequential position readout from arrays of micromechanical cantilever sensors
H.P. Lang, Rüdiger Berger, C. Andreoli et al. · Applied Physics Letters · 1998 · 156 citations · Full text
Engineering, Micromachines, Sensors +11
Micromechanical radiation dosimeter
Thomas Thundat, S. L. Sharp, Walter G. Fisher et al. · Applied Physics Letters · 1995 · 49 citations