Measurement of the thermal properties of thin dielectric films by a probe technique with periodic heating. I. Theory underlying the method

Abstract

The foundations of the theory underlying a method for measuring the thermal properties of anisotropic solids and thin dielectric films deposited on them are examined. An analysis of the solutions is performed, making it possible to establish the limiting possibilities of the periodic-heating technique and the conditions needed for an experiment that would permit measurement of the specific heat and the thermal conductivity of films with good accuracy.