Development of soft X-ray microscopy System using X-ray laser in JAERI Kansai

Abstract

A picosecond time-resolved soft X-ray microscopy system using an X-ray laser has been developed A 13.9nm coherent X-ray laser is generated by means of a ps CPA glass laser system. The pulse duration and the number of photons of the X-ray laser are about 7ps and 10 12 photons/ pulse, respectively. The X-ray laser pulse is condensed with a Schwarzschild optics and illuminated onto the sample. The transmitted X-ray image is magnified with a zone plate. X-ray images of a Cu mesh and a zone plate with spatial resolution of about 200nm has been obtained by a single shot of ps X-ray laser.