Fabrication of vertically aligned ultrafine ZnO nanorods using metal–organic vapor phase epitaxy with a two-temperature growth method

Abstract

We report the fabrication of vertically aligned ultrafine ZnO nanorods using metal-organic vapor phase epitaxy and applying a two-temperature growth method. First, thick nanorods were grown vertically on the substrate at a lower temperature. Then, ultrafine ZnO nanorods with an average diameter of 17.7 nm were grown from the tips of the thick nanorods at a higher temperature. The direction of the ultrafine ZnO nanorods followed that of the preformed vertically aligned thick nanorods. Electron microscopy revealed that the ultrafine nanorods were single crystals and the growth direction was along the c axis. Excellent photoluminescence characteristics of the nanorods were confirmed.