Publication | Closed Access
Recoils, flows and explosions: surface damage mechanisms in metals and semiconductors during 50 eV–50 keV ion bombardment
45
Citations
33
References
1999
Year
Surface Damage MechanismsIon ImplantationHeavy Ion PhysicEngineeringNuclear PhysicsPhysicsNatural SciencesApplied PhysicsIon Beam InstrumentationIon BeamIon EmissionExplosions
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