Photocatalytic Micropatterning of Transparent Ethylsilsesquioxane−Titania Hybrid Films

Abstract

Refractive index of ethylsilsesquioxane−titania hybrid films increased from 1.50 to 1.55 accompanied by a decrease in film thickness by about 30% after UV light irradiation. The contact angle for water of the films decreased from 95° to about 45° and the dynamic hardness increased with UV irradiation. These changes in physical and chemical properties of the films with UV irradiation were caused by the cleavage of silicon−carbon bonds and elimination of ethyl groups in the films due to the photocatalytic effect of the titania component. Micropatterning was successfully performed on the films coated on the substrates by UV irradiation through a photomask.