Publication | Closed Access
Structural, optical and electrical properties of argon implanted TiN thin films
48
Citations
23
References
2014
Year
Materials ScienceElectrical EngineeringOptical MaterialsEngineeringSurface ScienceApplied PhysicsTin Thin FilmsSemiconductor MaterialThin FilmsElectrical PropertiesChemical Vapor DepositionThin Film Processing
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