High‐power in‐phase coherently coupled VCSEL array based on proton implantation

Abstract

Three‐element in‐phase coherently coupled arrays of vertical cavity surface‐emitting lasers (VCSELs) were fabricated using proton implantation. The arrays show excellent beam quality with a far‐field divergence of 4°, while maintaining a stable in‐phase mode until a maximum output power of 4 mW under continuous‐wave condition. The process for the arrays is simple and the cost is low.