Ellipsometry applied to films on dielectric substrates

Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry

Frank L. McCrackin, Robert R. Stromberg, Harold L. Steinberg · Journal of Research of the National Bureau of Standards Section A Physics and Chemistry · 1963 · 618 citations · Full text

Natural Sciences, Chemistry, Materials Science +17

Determination of the Properties of Films on Silicon by the Method of Ellipsometry

R. J. Archer · Journal of the Optical Society of America · 1962 · 255 citations

Natural Sciences, Materials Engineering, Materials Science +16

Quarter-wave retardation systems based on the Fresnel rhomb principle

R. J. King · Journal of Scientific Instruments · 1966 · 68 citations

Natural Sciences, Materials Science, Physics +16

Polarimetric Methods for the Determination of the Refractive Index and the Thickness of Thin Films on Glass

Antonín Vašíček · Journal of the Optical Society of America · 1947 · 59 citations

Natural Sciences, Materials Science, Physics +16

Ellipsometry with Non-Ideal Compensators

R. J. Archer, C. V. Shank · Journal of the Optical Society of America · 1967 · 32 citations

Engineering, Electrical Engineering, Electromagnetics +9