Concepedia

Deposition of Fe-C:H coatings from a ferrocene precursor in a plasma-activated r.f. process

W. Luithardt, Carsten Benndorf

Diamond and Related Materials · 1995 · 19 citations · 2 references

DOI

Concepts

References

2

Deposition of Me-C: H coatings from metal organic precursors using a plasma-activated r.f. process

Carsten Benndorf, J.T. Harnack, U. Fell · Surface and Coatings Technology · 1993 · 20 citations

, , +16

Target effects during the deposition of Ti-a-C:H films

J.T. Harnack, F. Thieme, Carsten Benndorf · Surface and Coatings Technology · 1989 · 15 citations

, , +14