The evolution of sputtered iron nitride thin films under thermal treatment

Abstract

The thermal evolution of reactively sputtered iron nitride thin films has been investigated by x-ray diffraction, Mössbauer conversion electron spectroscopy, transmission electron microscopy, and magnetic measurements. The results show that, independently of the original nitrogen content of the films, a similar composition of the end products after the 500 °C annealings is reached, being all composed of α-Fe plus γ′-Fe4N in a wide range of relative proportions. The magnetic characteristics, however, are different depending on the nitrogen content of the as-deposited films.