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Self-sputtering and reflection

W. Eckstein, J.P. Biersack

The European Physical Journal B · 1986 · 57 citations · 21 references

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References

21

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Topics in applied physics

Richard T. Brown · Proceedings of the IEEE · 1980 · 939 citations

, , +14

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

W. D. Wilson, L.G. Haggmark, J.P. Biersack · Physical review. B, Solid state · 1977 · 810 citations

, , +14

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 792 citations

, , +13