Concepedia

Properties of chemically vapor-deposited Tungsten thin films on silicon wafers

Michael Diem, Jon Goldman

Thin Solid Films · 1983 · 22 citations · 4 references

DOI

Concepts

References

4

Chemically Vapor Deposited Tungsten for Semiconductor Metallizations

C. M. Melliar‐Smith, A. C. Adams, R. Kaiser et al. · Journal of The Electrochemical Society · 1974 · 44 citations

, , +17

Optically active interface states in MOS structures

E. Kamieniecki, R. Nitecki, Anna Świątek · Solid-State Electronics · 1980 · 43 citations

, , +14

Kinetics of the Chemical Vapor Deposition of Tungsten

W. A. Bryant, G. H. Meier · Journal of The Electrochemical Society · 1973 · 16 citations

, , +17

Tungsten Carbide by Pyrolysis of Tungsten Hexacarbonyl

Dallas T. Hurd, H. R. McEntee, P. H. Brisbin · Industrial & Engineering Chemistry · 1952 · 13 citations

, , +6