Publication | Closed Access
Influence of plasma pressure on the growth characteristics and ferroelectric properties of sputter-deposited PZT thin films
22
Citations
22
References
2010
Year
Materials ScienceGrowth CharacteristicsEngineeringFerroelectric ApplicationPlasma PressureApplied PhysicsFerroelectric PropertiesThin FilmsPyroelectricityThin Film Processing
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