Semiconductors · 2005 · 34 citations · 3 references
It is found that rapid oxidation of porous Si (por-Si) layers in air may occur in the form of combustion or explosion. Combustion occurs in por-Si layers thinner than 60 μm and impregnated with potassium nitrate, while explosion is observed in thicker porous layers. It is suggested that explosion develops by a thermal mechanism resulting from an exponential increase in the reaction rate with temperature.
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