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Effects of Ar gas pressure on microstructure of DLC films deposited by high-power pulsed magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringAr Gas PressureSurface ScienceApplied PhysicsVacuum DeviceDlc FilmsThin FilmsPulsed Laser DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing