CASINO: A new monte carlo code in C language for electron beam interactions—part II: Tabulated values of the mott cross section

Abstract

Abstract This paper presents routines to compute the Mott cross section used in the CASINO program (Monte CArlo SImulation of electroN trajectory in sOlid). The routines used tabulated values of the Mott cross section computed in the work of Czyzewski et al . (1990). The cross section is available over the range 0.02 to 30 keV and for the first 94 elements of the Periodic Table. The routines are written in C language and use a binary file to interpolate the cross section. The first routine computes the total Mott cross sections; the second calculates the polar angle of collision. Backscattered coefficients computed using different cross section are compared for C, Al, Ag, and Au. The Rutherford (1911) cross section and the available empirical equations (Browning et al . 1994, Gauvin and Drouin 1993) are compared to tabulated values of Mott. Also, the energy distribution of backscattered electrons is shown for Al and Au at 10 keV. Finally, the relative computation times for the different Mott cross sections are compared. It was found that tabulated Mott cross sections are more accurate and faster than any empirical Mott cross sections. The tabulated Mott cross sections are even faster than simple Rutherford cross sections.