Deep UV Mastering Using an All-Solid-State 266 nm Laser for an over 20 GBytes/Layer Capacity Disk

Abstract

The deep UV mastering process of the next generation high density disk is demonstrated for the first time using an all-solid-state continuous-wave 266 nm laser. We have developed a novel deep UV master recorder with a laser source, and achieved a density of 20 Gbytes capacity (14 Gbit/inch 2 ) with acceptable jitter for the compact disk size.