Concepedia

Publication | Closed Access

Formation of molybdenum nitride films by ion beam and vapor deposition method

DOI

29

Citations

7

References

1987

Year

F. Fujimoto, Y. Nakane, Mamoru Satou, Fumio Komori, K. Ogata, Yasunori Andoh
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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