The Joining of Parallel Plates via Organic Monolayers: Chemical Reactions in a Spatially Confined System

Abstract

Chemical reactions at monolayers are usually carried out by exposing the solid surface to reactive species in the liquid or gas phase. Here is investigated interactions including chemical reactions between two monolayers that are immobilized on two opposing solid substrates, a phenomenon known as wafer bonding. Covalent S–S bonds were formed in a photochemical reaction between disulfide groups on organosilane solid films under mild conditions, and the resulting bonded wafer pairs were found to have better fracture surface energy than the thermally bonded wafer