Structures of velocity distribution functions and transport parameters of the electron swarm in CH₄in a DC electric field

Abstract

The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a DC field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1<E/N<3000 Td.