A Lamb wave voltage sensor

Abstract

A voltage sensor using a Lamb wave delay line oscillator is described. The device consists of two pairs of interdigital transducers and one plate electrode at the central part of the device. All of these transducers have the counter electrodes on the bottom surface of the substrate. The oscillation frequency of the device changes significantly with the voltage applied to the central plate electrode. Performances of the voltage sensor are given, including sensitivity and its frequency dependence.