Applied Surface Science · 2014 · 47 citations · 19 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceSemiconductor DefectsSemiconductor Device MaterialsSemiconductor ReliabilitySemiconductor SurfacesSilicon MaterialsSurface ModificationEtch DamageSiliconSilicon DefectsSilicon OxidationSilicon Surface Science
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