On the axial structure of surface wave sustained discharges

Abstract

The axial distribution of the electron density related to the high-frequency field penetration in gas discharges maintained, in the diffusion controlled regime, by ionizing surface waves is obtained on the basis of the energy balance equations. It is shown that under conditions of comparatively weak electron collisions, the resonance absorption of the surface wave could cause essential deviations of the axial dependence of the plasma density from the linear one at both the end and the beginning of the discharge.