Materials ScienceMaterials EngineeringEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsCarbideChemical Vapor DepositionCermetMicrostructure
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Reactive and non-reactive high rate sputter deposition of Tungsten carbide
K. Fuchs, P. Rödhammer, E. Bertel et al. · Thin Solid Films · 1987 · 121 citations