Fabrication of ordered FePt nanoparticles with a cluster gun

Abstract

In this study we present a technique to obtain ordered fct FePt particles embedded in a C matrix. FePt nanoparticles are formed inside a high-pressure sputtering cell, called a particle gun (PG), and subsequently deposited on the substrate through a small orifice. These particles have a uniform size distribution with an average particle size that can be controlled in the range of 3–10 nm by adjusting the sputtering cell pressure, power, distance between the magnetron and the orifice, and by using a liquid nitrogen cooling jacket. The particles are converted to the L10 phase as they pass through a specially designed heating stage, attached to the top of the PG, heated by halogen lamps, thus avoiding alloying and oxidation effects. A strong dependence of coercivity on both the particle size and temperature was observed.