Advanced Materials · 2011 · 34 citations · 33 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySurface ScienceEtching ProcessesNanostructured SurfacesOxide SemiconductorsSilicon MaterialsThin Film EtchingThin Film LithographyAnnealingEtchingSilicon EtchingSilicon NanocrystalsSurface EtchingSurface Reconstruction ControlThree-dimensional Nanostructuring
The combination of solvent annealing, surface reconstruction, and a tone-reversal etching procedure provides an attractive approach to utilize block copolymer (BCP) lithography to fabricate highly ordered and densely packed silicon oxide nano-dots on a surface. The obtained silicon oxide nano-dots feature an areal density of 1.3 teradots inch(-2) .
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Controlling Polymer-Surface Interactions with Random Copolymer Brushes
P. Mansky, Y. Liu, E. Huang et al. · Science · 1997 · 1.3K citations