Concepedia

Publication | Open Access

A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

DOIFull Paper Access

98

Citations

35

References

2013

Year

Markus Kubicek, Gerald Holzlechner, Alexander Karl Opitz, Silvia Larisegger, Herbert Hutter, Jürgen Fleig
Applied Surface Science

References

YearCitations

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