Publication | Closed Access
Advances in plasma-enhanced chemical vapor deposition of silicon films at low temperatures
65
Citations
38
References
2002
Year
Materials ScienceLow TemperaturesEngineeringSurface ScienceApplied PhysicsSilicon FilmsThin FilmsChemical DepositionPlasma ProcessingChemical Vapor DepositionSilicon On InsulatorThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1