Advances in plasma-enhanced chemical vapor deposition of silicon films at low temperatures

High rate growth of microcrystalline silicon at low temperatures

Michio Kondo, Makoto Fukawa, Lihui Guo et al. · Journal of Non-Crystalline Solids · 2000 · 294 citations

Engineering, Materials Engineering, Materials Science +16

Effect of hydrogen dilution on the structure of amorphous silicon alloys

D. V. Tsu, B. S. Chao, Stanford R. Ovshinsky et al. · Applied Physics Letters · 1997 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +17

Kinetics of Surface Growth: Phenomenology, Scaling, and Mechanisms of Smoothening and Roughening

W. M. Tong, R. Stanley Williams · Annual Review of Physical Chemistry · 1994 · 235 citations

Natural Sciences, Materials Engineering, Materials Science +12

Optimization of hydrogenated amorphous silicon <i>p–i–n</i> solar cells with two-step <i>i</i> layers guided by real-time spectroscopic ellipsometry

Joohyun Koh, Yeeheng Lee, Hiroyuki Fujiwara et al. · Applied Physics Letters · 1998 · 225 citations

Natural Sciences, Materials Engineering, Materials Science +17

Defect formation during growth of hydrogenated amorphous silicon

Gautam Ganguly, Akihisa Matsuda · Physical review. B, Condensed matter · 1993 · 167 citations

Natural Sciences, Materials Engineering, Materials Science +17