Sensors and Actuators B Chemical · 2001 · 42 citations · 0 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsSensorsAcoustic SensorsMechanical SensorsMems ResonatorsMicroelectromechanical SensorsOscillatorsVibration MeasurementMicroelectromechanical OscillatorsMicromechanical OscillatorsOscillator CircuitsOscillator DevicesOscillator Topology DesignSawtooth Wave GeneratorsSensor Applications