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Nanocrystalline cubic silicon carbide films prepared by hot-wire chemical vapor deposition using SiH4/CH4/H2 at a low substrate temperature

Materials ScienceMaterials EngineeringChemical EngineeringLow Substrate TemperatureEngineeringNanotechnologyApplied PhysicsSemiconductor Device FabricationChemical Vapor DepositionThin Film ProcessingCarbide