Publication | Open Access
III-V/Si photonics by die-to-wafer bonding
208
Citations
25
References
2007
Year
Photonic DevicePhotonicsOptical MaterialsOptical InterconnectsEngineeringIntegrated PhotonicsWafer Scale ProcessingDevice IntegrationApplied PhysicsSi LaserIntegrated CircuitsPhotonic Integrated CircuitSilicon On InsulatorIii-v/si PhotonicsOptoelectronicsIndirect BandgapCompact Optical Functions
Photonic integrated circuits offer the potential of realizing low-cost, compact optical functions. Silicon-on-insulator (SOI) is a promising material platform for this photonic integration, as one can rely on the massive electronics processing infrastructure to process the optical components. However, the integration of a Si laser is hampered by its indirect bandgap. Here, we present the integration of a direct bandgap III-V epitaxial layer on top of the SOI waveguide layer by means of a die-to-wafer bonding process in order to realize near-infrared laser emission on and coupled to SOI.
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