Energies of Cu1+ ions sputtered from Cu by very low energy (50 eV < E < 1 keV) Inert gas ions

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

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II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

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Surface investigation of solids by the statical method of secondary ion mass spectroscopy (SIMS)

A. Benninghoven · Surface Science · 1973 · 447 citations

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Inelastic ion-surface collisions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 358 citations

Sputtering of Surfaces by Positive Ion Beams of Low Energy

Richard E. Honig · Journal of Applied Physics · 1958 · 260 citations

Natural Sciences, Materials Science, Physics +15