Rapid and Localized Synthesis of Single-Walled Carbon Nanotubes on Flat Surface by Laser-Assisted Chemical Vapor Deposition

Abstract

The synthesis of single-walled carbon nanotubes (SWNTs) at a controlled position on a flat surface was demonstrated by laser-assisted chemical vapor deposition (CVD). The developed multilayer substrate including an energy-confining layer (ECL) enabled the efficient heating of catalysts on the surface, resulting in the rapid and localized syntheses of SWNTs. Using a Nd:YAG laser as a heat source, we achieved the rapid synthesis with laser irradiation for 1 s and the localized synthesis in an area of approximately 1 µm diameter. In addition, the scanning of the laser irradiation spot at a rate of 1 µm/s enabled the line-patterned synthesis of SWNTs at a linewidth of 2 µm. The resulting synthesis of SWNTs on a flat surface by laser-assisted CVD will lead to the easy and controllable fabrication of SWNT-based nanodevices.