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Stoichiometry behavior of TaN, TaCN and TaC thin films produced by magnetron sputtering

Materials ScienceMagnetismMaterials EngineeringMaterial AnalysisEngineeringPhysicsStoichiometry BehaviorSurface ScienceApplied PhysicsTac Thin FilmsMagnetron SputteringMagnetic Thin FilmsThin FilmsChemical DepositionThin Film ProcessingMagnetic Medium