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A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy

Chemical EngineeringEngineeringPhysicochemical AnalysisSurface ChemistrySurface ScienceApplied PhysicsThermal Desorption SpectroscopyChemisorptionPhysical ChemistryHydrogenChemistryThin FilmsH FilmsComparative AnalysisChemical Vapor Deposition