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A finite element analysis of the effects of residual stress, substrate roughness and non-uniform stress distribution on the mechanical properties of diamond-like carbon films

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringMechanical PropertiesMechanical BehaviorFinite Element AnalysisMechanical EngineeringApplied PhysicsStressstrain AnalysisMaterial ModelingSolid MechanicsResidual StressMechanics Of MaterialsSubstrate Roughness