Electrical and optical properties of pyrolytically electrostatic sprayed fluorine-doped tin–oxide: Dependence on substrate–temperature and substrate–nozzle distance

Abstract

Tin–oxide (SnO2) thin films were prepared by a modified spray technique called electrostatic spray pyrolysis. Their electrical and optical properties dependence on fluorine concentration, substrate temperature Ts, and the substrate–nozzle distance Dsn was studied. Dsn and Ts seem to be interrelated for the optimization of good quality fluorine-doped SnO2 films. Films of about 9×10−4 Ω cm resistivity and high visible 85% transparency were obtained for a substrate temperature of 550 °C, a 6 cm substrate nozzle distance, and 80% of hydrofluorhydric acid HF in the starting solution. These data are discussed in light of the kinetics reaction.