Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 29 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsThin FilmsX-ray AstronomyCoatingsOptical Thin FilmsTelescope OpticsThin-film DepositionX-ray OpticsX-ray TelescopesCoated GlassCompressive LoadsGrazing Incidence OpticsMirror OpticsResidual Stress Induced DistortionX-ray Mirror FabricationX-ray Mirrors
Next generation’s lightweight, high resolution, high throughput optics for x-ray astronomy requires integration of very thin mirror segments into a lightweight telescope housing without distortion. Thin glass substrates with linear dimension of 200 mm and thickness as small as 0.4 mm can now be fabricated to a precision of a few arc-seconds for grazing incidence optics. Subsequent implementation requires a distortion-free deposition of metals such as iridium or platinum. These depositions, however, generally have high coating stresses that cause mirror distortion. In this paper, we discuss the coating stress on these thin glass mirrors and the effort to eliminate their induced distortion. It is shown that balancing the coating distortion either by coating films with tensile and compressive stresses, or on both sides of the mirrors is not sufficient. Heating the mirror in a moderately high temperature turns out to relax the coated films reasonably well to a precision of about a second of arc and therefore provide a practical solution to the coating problem.
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Thin-film deposition: principles and practice
Choice Reviews Online · 1996 · 714 citations
Natural Sciences, Materials Engineering, Materials Science +17
Residual stress and crystal orientation in magnetron sputtering Au films
Wu Tang, Kewei Xu, Ping Wang et al. · Materials Letters · 2003 · 26 citations
Natural Sciences, Materials Engineering, Materials Science +16
W. W. Zhang, Michael P. Biskach, Peter Blake et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations · Full text
Natural Sciences, Astronomy, Physics +15