ISIJ International · 1994 · 10 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsThin FilmsCeramic TechnologyLaser Surface ProcessingThermal Properties Of CeramicsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsCeramic Thin FilmsLaser Irradiation ParametersLaser Pulse DurationOptical Emission SpectroscopyOxide CeramicsPulsed Laser DepositionThin Film CeramicsX-ray Emission Spectroscopy
Thin films of ceramic materials (Al203' Zr02) for technical applications are deposited at different laser parameters (wavelength, fluence, mode of operation) and processing variables (processing gas pressure and composition, rf bias, distance target-substrate).
1
Laser ablation for materials synthesis
David C. Paine, J. C. Bravman · 1990 · 88 citations
Natural Sciences, Materials Engineering, Materials Science +17