Image-Formation Technique for Scanning Electron Microscopy and Electron Probe Microanalysis

Abstract

A technique is described for topographic images on the scanning electron microscope and the scanning electron probe microanalyzer. In this technique, the brightness of the oscilloscope is modulated by a signal obtained by mixing the signal (from secondary electrons or targets current) with its first derivative. This enhances minor topographic features which are poorly reproduced in the technique.