Chemical vapour deposition growth of graphene layers on metal substrates

S-C Yu, P. M. Rafailov, E. Vlaikova, Stefan Valkov, Stefan Petrov, J. Koprinarova, Penka Terziyska, Vera Marinova, S. H. Lin, Pu Yu,

Journal of Physics Conference Series · 2014 · 11 citations · 9 references

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Abstract

Graphene layers were grown by chemical vapour deposition (CVD) on Si wafers covered by a SiO2 substrate layer and a Ni interlayer, and on copper and nickel foil. The obtained graphene layers were characterized by Raman spectroscopy. The films grown on SiO2/Ni substrate and Ni foil comprise mainly multilayer defect-rich graphene, while those on Cu foil exhibit the spectroscopic fingerprint of relatively defect-free single-layer graphene due to the low carbon solubility in copper and the suitably chosen substrate position in a quasiclosed volume. Optimal growth conditions and the nature of defects in the layers are discussed.

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