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Crystallization and ablation in annealing of amorphous-Si thin film on glass and crystalline-Si substrates irradiated by third harmonics of Nd3+:YAG laser

Materials ScienceThird HarmonicsEngineeringPhysicsOptical PropertiesCrystal Growth TechnologyApplied PhysicsYag LaserAmorphous-si Thin FilmThin FilmsPulsed Laser DepositionAmorphous SolidOptoelectronicsSilicon On Insulator