Publication | Closed Access
Deconvolution of the effect of apparatus broadening and the kinetic energy spread of the parent ion beam from metastable peak shapes
28
Citations
13
References
1980
Year
Ion ImplantationKinetic Energy SpreadEngineeringPhysicsParent Ion BeamApplied PhysicsAtomic PhysicsIon BeamApparatus BroadeningIon EmissionIon Process
| Year | Citations | |
|---|---|---|
Page 1
Page 1