Modeling of contact behavior between polishing pad and workpiece surface

Contact and Rubbing of Flat Surfaces

J. F. Archard · Journal of Applied Physics · 1953 · 7.7K citations

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Contact of nominally flat surfaces

J. A. Greenwood, J. B. P. Williamson · Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1966 · 5.6K citations

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The temperature of rubbing surfaces

J. F. Archard · Wear · 1959 · 1K citations

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The Elastic Contact of Rough Spheres

J. A. Greenwood, J. H. Tripp · Journal of Applied Mechanics · 1967 · 731 citations

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A micro-contact and wear model for chemical–mechanical polishing of silicon wafers

Yongwu Zhao, L. Chang · Wear · 2002 · 301 citations

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