MEMS scanner based swept source laser for optical coherence tomography

Abstract

We developed a swept source laser using a micro electro mechanical systems(MEMS) scanner mirror, and demonstrated optical coherence tomography. To enable both the wide tuning wavelength range and high scanning frequency, we introduced 2-degree-of-freedom(2-DOF) MEMS scanner mirror. A tunable optical filter is composed of a MEMS scanner mirror and a diffraction grating which is arranged in Littrow configuration. We built a swept source laser which has a wavelength range of 143 nm, center wavelength of 1304 nm, and a peak power of 16 mW. OCT measurements are performed at a rate of 17.9 kHz and doubled 35.9 kHz at unidirectional and bidirectional sweeps, respectively. The system sensitivity is 101.5 dB.